Research Projects
Release time: 2023-07-17Hits:
- Affiliation of Participant(s):电子科学与技术学院（国家示范性微电子学院）
- Leading Scientist:LWY
- Status:已验收
- Supported by:信息科学部
- Classification of Project:青年科学基金项目
- Type of Project:基础研究
- Nature of Project:纵向
- Supported by:国家自然科学基金项目
- Project Number:纵20210332
- Date of Project Approval:2020-01-01
- Scheduled completion time:2023-12-31
- Date of Project Completion:2024-03-26
- Date of Project Initiation:2021-01-01
- Pre One:硅基雾化芯深硅刻蚀
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